Dr. Frank Karl Urban, III department of Electrical and Computer Engineering




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НазваниеDr. Frank Karl Urban, III department of Electrical and Computer Engineering
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Curriculum Vitae, 1 June, 2009

Dr. Frank Karl Urban, III

Department of Electrical and Computer Engineering


Florida International University

University Park Campus

Miami, Florida 33199

(305) 348 2807 secretary, (305) 348 3705 office, (305) 255 3042 home

Education


3 15 81 Ph.D., Materials Science and Engineering,

University of Florida

3 15 80 MS, Materials Science and Engineering,

University of Florida

8 15 77 MS, Biomedical Engineering,

The Ohio State University

12 10 70 BSEE, Electrical Engineering,

The Ohio State University

Experience


7 90 to Associate Professor

present Electrical and Computer Engineering

Florida International University, Miami, Florida 33199

Established Thin Film Research Laboratory. Developed, designed, and constructed nanoparticle beam thin film deposition systems. Developed advanced data reduction methods for ellipsometry using a variety of new algorithms including artificial neural networks for real time, in situ film growth monitoring and control. Developed new methods for analyzing rough surfaces using ellipsometry and atomic force microscopy in a combined method. Built and begun testing of nanoparticle deposition under National Science Foundation support to develop thin films using a sputtering based nanoparticle source. Finally, multimedia presentation of the sensitivity and condition of the measurements in ellipsometry are being clarified both in movie format presentations and in web accessible data displays using high performance database technology.


9 1 82 to Assistant Professor

8 7 90 Electrical and Computer Engineering

University of Miami, Coral Gables, Florida 33124


Established the Solid State Materials Research Laboratory. Most of the required funds were obtained externally, primarily from the National Science Foundation. An ICB thin film deposition system which advances the state of the art was designed and constructed. The system was used both to study the underlying physical processes occurring in ICB, particularly cluster formation, and to produce novel thin films for evaluation as replacements for conventionally deposited films for microelectronic, electrooptical and optical applications. Also developed advanced data reduction methods for ellipsometry and implemented these for use on microcomputers.


1 1 87 to Visiting Professor, Ion Beam Engineering Experimental

1 1 88 Laboratory Kyoto University, Sakyo, Kyoto 606 JAPAN


Supported by National Science Foundation grant ($147,000   2 years) to perform ionized cluster beam deposition research for one year in the laboratory of Professors I. Yamada and T. Takagi, founders of the method. Research was performed to evaluate the ICB technique first hand in order to clear up the controversy resulting from the inability of other labs to repeat published results. In addition, preparations were made for establishing continuing ICB research in the US.


7 1 84 to Visiting Researcher, Ionized Cluster Beam Films

8 1 84 Eaton Ion Materials Systems, Beverly, Massachusetts


Continuation of ICB activities begun previous year, see immediately below.


6 1 83 to Visiting Researcher, Ionized Cluster Beam Films

9 1 83 Eaton Ion Materials Systems, Beverly, Massachusetts


Spent summers at Eaton to assist in research and development of a commercial ICB thin film deposition system. Worked with A. Kirkpatrick and P. Younger to identify microelectronics films in need of significant improvement and to initiate ICB process development for producing such films.


5 1 81 to Associate Principal Engineer, Advanced Technology Group

7 1 82 Harris Semiconductor, P. O. Box 883, Melbourne, Florida


Advanced Technology Group member charged with identifying and developing processes for use 2 to 5 years in the future. Worked with group leader E. Feit to develop thin film processes such as for laser trim resistors.

Refereed Publications




52. F.K. Urban III, D. Barton, and T. Tiwald, “Numerical Ellipsometry: Analysis of thin metal layers using n-k plane methods with multiple incidence angles” Thin Solid Films, submitted (2009)


51. Richard I. Dorin, Hemanth K. Pai, Jui T. Ho, John G. Lewis, David J. Torpy, Frank K. Urban III, and Clifford R. Qualls, “Validation of a simple method of estimating plasma free cortisol: Role of cortisol binding to albumin” Clinical Biochemistry, Volume 42, Issues 1-2, January 2009, Pages 64-71


50. F.K. Urban III and D. Barton, “Numerical Ellipsometry: Ellipsometer analysis in the n–k plane for growing films on unknown homogeneous, isotropic substrates and unknown, layered substrates” Thin Solid Films, Vol 517, Issue 1, pp 1081-1085 (2008)


49. F.K. Urban III and D. Barton, “Numerical ellipsometry: Ellipsometer analysis in the n–k plane for select combinations of metals, semiconductors, and insulators” Thin Solid Films Vol. 517, Issue 3, pp. 1063-1071 (2008)


48. D. Barton and F.K. Urban III, “Ellipsometer analysis in the n–k plane” Thin Solid Films, Volume 516, Issues 2-4, 3 December 2007, Pages 119-127


47. F. K. Urban III & D. Barton, “Ellipsometer measurements using focused and masked beams “, Thin Solid Films, 515, p. 911 (2006)


46. A.Khabari and F.K. Urban, III, “Partially ionized beam deposition of parylene”, Journal of Non-Crystalline Solids, Volume 351, Issues 43-45, pp 3536-3541 (2005)


45. A. Khabari, F. K. Urban III, P. Griffiths, I. Petrov, Y.-W. Kim, and C. Bungay, “Nanoparticle beam formation and investigation of gold nanostructured films”, J. Vac. Sci. Technol. B 21(6), pp. 2313-2318, Nov/Dec (2003)


44. F.K. Urban, III, A. Khabari, A. Hosseini-Tehrani, P. Griffiths, I. Petrov, and Y. Kim, “Nanophase films deposited from a high-rate, nanoparticle beam”, J. Vac. Sci. Tech, 20(3), pp 995,999 (2002)


43. F.K. Urban, III, A. Khabari, A. Hosseini-Tehrani, P. Griffiths, and C. Bungay “Optical properties of nanophase films measured by variable-angle spectroscopic ellipsometry”, Thin Solid Films, vol. 408, no. 1-2, pp. 211-217 (2002)


42. P. Zhang, F. Zuo, F.K. Urban III, A. Khabari, P. Griffiths, A. Hosseini-Tehrani, “Irreversible magnetization in nickel nanoparticles”, Journal of Magnetism and Magnetic Materials 225 (2001) 337–345


41. F.K. Urban, III, A. Khabari, A. Hosseini-Tehrani, and P. Griffiths, “Interesting optical properties of films composed of very small grains formed from a high-rate nanoparticle beam”, Thin Solid Films, 355-356, p 513 (1999)


39. F.K. Urban, III, A. Khabari, and G. Fernandez, “Nanophase copper thin films deposited from a beam source”, J. Vac. Sci. Tech. A, 17(4) p 2374 (1999)


38. A. Hosseini-Tehrani and F.K. Urban III, “Modeling of large cluster synthesis”, J. Vac. Sci. Tech. A, 17(4) p 2364 (1999)


37. F.K. Urban, III, D. Barton, and N. I. Boudani, “Extremely fast ellipsometry solutions using cascaded neural networks alone”, Thin Solid Films, 332, p 50 (1998)


36. F.K. Urban, III and David Barton, “Toward a priori selection of ellipsometry angles and wavelengths using a high performance semantic database”, Thin Solid Films, 313/314, p 119 (1998)


35. M.F. Tabet and F.K. Urban, III, “Deconvolution of tip affected atomic force microscope images and comparison to Rutherford backscattering spectrometry”, J. Vac. Sci. Tech. A, 15(4) p 800 (1997)

34. F.K. Urban, III and D. Barton, “Sensitivity of variable angle spectroscopic ellipsometry to isotropic thin film properties”, Thin Solid Films, 308/309, p 31 (1997)


33. P. Ruzakowski Athey, M. F. Tabet, and F. K. Urban III, “Determining the optical properties of a mixed-metal oxide film, Co3-x-yCrxFeyO4, with spectroscopic ellipsometry and atomic force microscopy”, J. Vac. Sci. Tech. A, 15(3) p 998 (1997)


32. C.S. Lindquist and F.K. Urban, III, “Analysis of surface void fraction using atomic force microscopy”, J. Vac. Sci. Tech. A, 14(3) p 1957 (1996)


31. D. Barton, J.C. Comfort, and F.K. Urban, III, “Numerical ellipsometry: Real time solutions using mapping onto the complex index plane”, J. Vac. Sci. Tech. A, 14(3) p 786 (1996)


30. F. K. Urban III, and J.C. Comfort, “Numerical ellipsometry: Applications of a new algorithm for real-time, in situ film growth monitoring”, J. Vac. Sci. Tech. A, 14(4) p 2331 (1996)


29. M.F. Tabet and F.K. Urban, III, “Comparison of atomic force microscope and Rutherford backscattering spectrometry data of nanometre size zinc islands”, Thin Solid Films, 290/291, p 312 (1996)


28. J.C Comfort, F.K. Urban III, and D. Barton, “An algorithm for analyzing ellipsometric data taken with multiple angles of incidence”, Thin Solid Films, 290/291, p 51 (1996)


27. P. R. Athey, F. K. Urban, III, and P. H. Holloway, “Use of multiple analytical techniques to confirm improved optical modeling of SnO2:F films by atomic force microscopy and spectroscopic ellipsometry”, J. Vac. Sci. Tech. B, 14(6) p 3436 (1996)


26. F. K. Urban, III and J. C. Comfort, “Numerical Ellipsometry: applications of a new algorithm for real-time, in situ film growth monitoring”, J. Vac. Sci. Tech. A, 14(4) p 2331 (1996)


25. C.S. Lindquist and F.K. Urban, III, “Surface analysis algorithms for scanning probe microscopy”, Thin Solid Films, 270, ½, p 399 (1995)


24. J.C. Comfort and F.K. Urban, III, “Numerical techniques useful in the practice of ellipsometry”, Thin Solid Films, 270, ½, p 78 (1995)


23. A.J. Cox, J.J. Nainaparampil, M.F. Tabet, A. Hosseini-Tehrani, and F.K. Urban, III, “Recent developments in ionized cluster beam thin film deposition”, Thin Solid Films, 270, ½, p 637 (1995)


22. M.F. Tabet, S.W. Feng, A.J. Cox, and F.K. Urban, III, “Investigation of silver in the ionized cluster beam deposition technique”, J. Phys. D.: Appl. Phys., 28(11), pp 2365-2370 (1995)

21. S.W. Feng, J.J. Nainaparampil, M.F. Tabet, and F.K. Urban, III, “Gold and zinc thin films deposited by the ionized cluster beam technique”, Thin Solid Films, 253, pp 402 - 406 (1994)


20. F.K. Urban, III, P. Romine, and Md. S. Islam, “Advanced image processing in scanning probe microscopy”, This Solid Films, 253, pp 318 - 325 (1994)


19. F.K. Urban, III and John Craig Comfort, “Numerical Ellipsometry; enhancement of new algorithms for real time, in-situ film growth monitoring”, Thin Solid Films, 253, pp 262 - 268 (1994)


18. F.K. Urban, III, P. Ruzakowski Athey, and Md. S. Islam, “Modeling of surface roughness on variable angle spectroscopic ellipsometry using advanced processing of atomic force microscopy images”, Thin Solid Films, 253, pp 326 - 332 (1994)


17. F.K. Urban, III and M.F. Tabet, “Development of artificial neural networks for in situ ellipsometry of films growing on unknown substrates”, J. Vac. Sci. Tech., 12(2) p 1952 (1994)


16. F.K. Urban, III, S.W. Feng, and J.J. Nainaparampil, “Formation of zinc clusters in ionized cluster beam deposition”, J. Appl. Phys. 74(2), (1993)


15. F.K. Urban, III, Atoosa Hosseini Tehrani, S.W. Feng, and J.J. Nainaparampil, “Selective area deposition of metal films by the ionized cluster beam deposition technique”, Appl. Phys. Lett., 62 (24), 14 June (1992)


14. F.K. Urban, III, S.W. Feng, and J.J. Nainaparampil, “Study of zinc films using large clusters in the ionized cluster beam deposition technique”, J. Vac. Sci. Tech. B, 11(5) pp 1916 1920 (1993)


13. F.K. Urban, III and M.F. Tabet, “In situ ellipsometry of films grown on unknown substrates”, J. Vac. Sci. Tech. A, Vol. 11, No. 4, pp 976   980, July/Aug (1993)


12. F.K. Urban, III, S.W. Feng, and J.J. Nainaparampil, “Formation of zinc clusters in ionized cluster beam deposition”, Appl. Phys. Lett., 61(10), 1180 (1992)


11. F.K. Urban, III and M.F. Tabet, “Real time, in situ ellipsometry solutions using artificial neural network pre processing”, Thin Solid Films, 245, pp 167-173 (1994)


10. F.K. Urban, III, D.C. Park, and M.F. Tabet, “Development of artificial neural networks for real time, in situ ellipsometry data reduction”, Thin Solid Films, 220 (1992) 247 253, 20 Nov (1992)


9. F.K. Urban, III, “Ellipsometry algorithm for absorbing films”, Appl. Opt., 32 (13), (1992)


8. F.K. Urban, III and S.W. Feng, “Effects of space charge on ion energy in ionized cluster beam film deposition”, J. Vac. Sci. Tech., A. 10(4) p 1488 July/August (1992)


7. F.K. Urban, III and A.I. Bernstein, “Study of the ionized cluster beam technique”, J. Vac. Sci. Tech., A 9(3), pp. 537   540 May June (1991)


6. F.K. Urban, III and A.Bernstein, “Formation of Gold Clusters in the Ionized Cluster Beam Deposition Technique”, Thin Solid Films, 193/194 (1 2), 92, (1990)


5. F.K. Urban, III and M. Zahn, “Study of the ionized cluster beam technique”, J. Vac. Sci. Tech., A 8(3), pp. 1453   1457 May June (1990)


4. F.K. Urban, III, “Study of ionized cluster beam using energy analyzed gold depositions”, J. Appl. Phys., 67(11), 7082 (1990)


3. F.K. Urban, III, “Ellipsometer measurement of thickness and optical properties of thin absorbing films”, Appl. Surf. Sci., 33/34, pp. 966   971, (1988)


2. F.K. Urban, III, L. L. Levenson, H. Hashimoto, H. Usui, I. Yamada and T. Takagi, “Optical Properties of Reactive ICB Aluminum Oxide Films Deposited on Si (100)”, Appl. Surf. Sci., 33/34, pp. 934   941, (1988)


1. F.K. Urban, III, R E Hummel and E.D. Verink, Jr., “Differential Reflectometry of Thin Film Metal Oxides on Copper, Tungsten, Molybdenum and Chromium”, Corrosion Science, 22(7), pp. 647   660, (1982)


Conference Presentations


55. “Numerical Ellipsometry: Analysis of thin metal layers using n-k plane methods with multiple incidence angles”, 36th International Conference on Metallurgical Coatings and Thin Films, April (2009)


54. “Numerical Ellipsometry: Ellipsometer analysis in the n–k plane for growing films on unknown homogeneous, isotropic substrates and unknown, layered substrates”, 35th International Conference on Metallurgical Coatings and Thin Films, April (2008)


53. “Numerical ellipsometry: Ellipsometer analysis in the n–k plane for select combinations of metals, semiconductors, and insulators” 35th International Conference on Metallurgical Coatings and Thin Films, April (2008)


52. “Ellipsometer analysis in the n–k plane” 34th International Conference on Metallurgical Coatings and Thin Films, April (2007)


51. “Ellipsometer measurements using focused and masked beams“, 33rd International Conference on Metallurgical Coatings and Thin Films, April (2006)


50. “Nanophase metal-metal oxide films deposited from a High-rate, Nanoparticle Beam”, 46th National Symposium of the American Vacuum Society, (2000)


49. “Interesting materials deposited from a nanoparticle beam”, 27th International Conference on Metallurgical Coatings and Thin Films, April (2000)


48. “Interesting Properties of Nanophase Films Deposited from a High-rate, Nanoparticle Beam”, 45th National Symposium of the American Vacuum Society (1999)


47. “Vacuum beam deposited nanophase thin films using Copper and Cobalt source materials”, 26th International Conference on Metallurgical Coatings and Thin Films, April (1999)


46. “A web accessible ellipsometry solving engine using the variably damped least squares algorithm assisted by measured data point and derivative preselection for improvement of solutions”, 26th International Conference on Metallurgical Coatings and Thin Films, April (1999)


45. “Nanophase copper thin films deposited from a beam source”, 45th National Symposium of the American Vacuum Society (1998)


44. “Extremely fast ellipsometry solutions using cascaded neural networks alone”, 25th International Conference on Metallurgical Coatings and Thin Films, April (1998)


43. invited - F. K. Urban, III, “A priori selection of ellipsometry angles and wavelengths for in situ film growth control”, IMPROVE, Malvern UK June (1997)


42. “A priori selection of ellipsometry angles and wavelengths using a high performance semantic database”, F.K. Urban, III and David Barton, International Conference on spectroscopic ellipsometry, Charleston (1997)


41. invited - “Ellipsometry: a new film and surface analysis method with and old name”, 24th International Conference on Metallurgical Coatings and Thin Films, April (1997)

40. “Comparison of Ellipsometry Measurements of Films Deposited on Fused Silica Substrates in a Round-robin Experiment, part 2”, 43rd National Symposium of the American Vacuum Society (1996)


39. invited - “Ellipsometry: a new film and surface analysis method with and old name”,

Mexican Vacuum Society International Conference (1996)


  1. invited - “Comparison of Ellipsometry Measurements of Films Deposited on Fused Silica Substrates in a Round-robin Experiment”, 23rd International Conference on Metallurgical Coatings and Thin Films, April (1996)


37. “Numerical Ellipsometry: Real-time solution methods for in situ film growth monitoring”, D. Barton, J.C. Comfort, and F.K. Urban III, 42nd National Symposium of the American Vacuum Society (1995)


36. “Analysis of surface void fraction using atomic microscope data”, C.S. Lindquist and F.K. Urban, III, 42nd National Symposium of the American Vacuum Society (1995)


35. “Surface analysis algorithms for scanning probe microscopy”, C.S. Lindquist and F.K. Urban, 22nd International Conference on Metallurgical Coatings and Thin Films, April (1995)


34. “Numerical techniques useful in the practice of ellipsometry”, J.C. Comfort and F.K. Urban, III, 22nd International Conference on Metallurgical Coatings and Thin Films, April (1995)


33. “Recent developments in ionized cluster beam thin film deposition”, A.J. Cox, J.J. Nainaparampil, M.F. Tabet, A. Hosseini-Tehrani, F.K. Urban, III, 22nd International Conference on Metallurgical Coatings and Thin Films, April (1995)


32. “Numerical Ellipsometry: new algorithms for real-time in situ film growth monitoring and ex situ variable spectroscopic film measurements”, F.K. Urban, J.C. Comfort, and D. Barton, the Southeastern AVS Conference Feb (1995)


31. “Numerical Ellipsometry: Applications of a New Algorithm for Real Time, in-situ Film Growth Monitoring”, J.C. Comfort & F.K. Urban III, 41st National Symposium of the American Vacuum Society (1994)


30. “Developments in the Ionized Cluster Beam Deposition Technique”, M.F. Tabet, S.W. Feng, A.J. Cox, and F.K. Urban III, 41st National Symposium of the American Vacuum Society (1994)


29. “Gold and zinc thin films deposited by the ionized cluster beam technique”, S.W. Feng, J.J. Nainaparampil, M.F. Tabet, and F.K. Urban, III, 21st International Conference on Metallurgical Coatings and Thin Films, April (1994)


28. “Advanced image processing in scanning probe microscopy”, F.K. Urban III, P. Romine, and Md. S. Islam, 21st International Conference on Metallurgical Coatings and Thin Films, April (1994)


  1. “Numerical Ellipsometry; enhancement of new algorithms for real time, in-situ film growth monitoring”, F.K. Urban III and John Craig Comfort, 21st International Conference on Metallurgical Coatings and Thin Films, April (1994)


26. “Modeling of surface roughness on variable angle spectroscopic ellipsometry using advanced processing of atomic force microscopy images”, F.K. Urban III, P. Ruzakowski Athey, and Md. S. Islam, 21st International Conference on Metallurgical Coatings and Thin Films, April (1994)


25. “Study of zinc cluster formation in the cluster beam deposition technique”, J.J. Nainaparampil S.W. Feng, and F.K. Urban III, 40th National Symposium of the American Vacuum Society (1993)


24. “Development of artificial neural networks for in situ ellipsometry of films growing on unknown substrates”, F.K. Urban III and M.F. Tabet, 40th National Symposium of the American Vacuum Society (1993)


23. “Development of sinusoidal modulated time of flight method for real time measurement of cluster size in ionized cluster beam film deposition”, F.K. Urban III, A. Hosseini-Tehrani, 40th National Symposium of the American Vacuum Society (1993)


22. “Development of artificial neural networks for in situ ellipsometry of films growing on unknown substrates”, F.K. Urban III and M.F. Tabet, 40th National Symposium of the American Vacuum Society (1993)


21. “Development of a sinusoidal modulated time of flight method for real time measurement of cluster size in ionized cluster beam deposition”, F.K. Urban III and A. Hosseini Tehrani, 40th National Symposium of the American Vacuum Society (1993)


20. “Study of zinc cluster formation in the cluster beam deposition technique” J.J. Nainaparampil, S.W. Feng, and F.K. Urban III, 40th National Symposium of the American Vacuum Society (1993)


19. “Developments in Cluster Beam Film Formation”, F.K. Urban, III, IUVSTA Workshop, Kitzsteinhorn, Austria, May (1993)

18. “Real time, in situ ellipsomtery thin film analysis using artificial neural networks”, F.K. Urban III, D.C. Park and M.F. Tabet, the Southeastern AVS Conference Feb (1993)


17. “In situ ellipsometry of films grown on unknown substrates”, F.K. Urban III and M.F. Tabet, 39th National Symposium of the American Vacuum Society (1992)


16. “Modeling of the cluster formation process in the ionized cluster beam deposition technique”, F.K. Urban, III and A.I. Bernstein, 39th National Symposium of the American Vacuum Society (1992)


15. “Study of zinc films using large clusters in the ionized cluster beam deposition technique”, F. K. Urban, III, S.W. Feng, and J.J. Nainaparampil, 39th National Symposium of the American Vacuum Society (1992)


14. “Development of artificial neural networks for real time, in situ ellipsometry data reduction”, F. K. Urban, III, D.C. Park and M.F. Tabet, 19th International Conference on Metallurgical Coatings and Thin Films, April (1992)


13. “Ionized Cluster Beam Deposition”, F.K. Urban, III, the Southeastern AVS Conference Feb (1992)


12. “Effects of space charge on ion energy in ionized cluster beam film deposition”, F.K. Urban, III and S.W. Feng, 38th National Symposium of the American Vacuum Society (1991)


11. “Cluster Measurement in Ionized Cluster Beam Deposition”, F.K. Urban III, the Southeastern AVS Conference Feb (1991)


10. “Cluster Size and Film Uniformity in Ionized Cluster Beam Deposition”, F.K. Urban III, invited, SPIE 1990 International Symposium on Optical and Optoelectronic Applied Science and Engineering, July (1990)


9. “Formation of Gold Clusters in the Ionized Cluster Beam Deposition Technique”, F.K. Urban III and A.Bernstein, 8th International Conference on Thin Films, 17th International Conference on Metallurgical Coatings, April (1990)


8. “Measurement of Gold Cluster Size in Ionized Cluster Beam Deposition”, F.K. Urban III, M. Zahn and A. Bernstein, the Southeastern AVS Conference Feb (1990)


7. “Study of the Ionized Cluster Beam Deposition Technique”, F.K. Urban III and M. Zahn, Annual Symposium of the AVS, Oct (1989)


6. “Study of the Ionized Cluster Beam Deposition Technique”, F.K. Urban III, 25th Annual Symposium of the New Mexico Chapter of the AVS, May (1989)


5. “Investigations of Ionized Cluster Beam Film Interfaces using Ellipsometry”, the Southeastern AVS Conference Feb (1989)


4. “Optical Properties of Aluminum Oxide Thin Films Deposited on Silicon Substrates by Reactive Ionized Cluster Beam Deposition”, F.K. Urban III, L. Levenson, I. Yamada and T. Takagi, Invited Paper, Proc. 11th Symp. on Ion Sources and Ion Assisted Technology, Tokyo (1987)


3. “Current Status of ICB Cooperative Research between Japan and U.S. Universities”, T. Takagi, I. Yamada, M. Yasunaga, K. Matsuda, R. H. Cornely, L. Levenson and F. K. Urban, III, MRS meeting, April (1987)


2. “Optical Measurements of Semico nductor Product Thin Films using the Differential Reflectometer”, the Southeastern AVS Conference (1982)


1. “Deposition, Modeling and Laser Trimming of Cr Si Resistor Films”, Harris Semiconductor Technology Review (1982)


Conference Proceedings


1. F. K. Urban, III and A. I. Bernstein, “Cluster size in ionized cluster beam deposition,” Proc. SPIE Optical Thin Films and Applications, (1990)


2. S. Savrda, M. D. Himmel, K. H. Guenther, and F. K. Urban, III, “Developments in in situ ellipsometer monitoring of thin film growth during reactive ion plating deposition,” Proc. SPIE Optical Thin Films and Applications, 1270 (1990)


3. S. Savrda, M. D. Himmel, K. H. Guenther, and F. K. Urban, III, “Process analysis of thin film deposition with an in situ ellipsometer,” Proc. SPIE Polarization Considerations for Optical Systems II, 1166, (1989)

Research Areas


General:

Microelectronics materials and processing

Optical properties of materials

Thin films, formation and characterization


Specialization:

Nanoparticle Beam formation of conductive nanoparticles in an inert gas atmosphere and formation of thin films therefrom

Ionized Cluster Beam thin film deposition method with emphasis on characterizing the depositing beam and depositing films for microelectronics and optical applications

Partially Ionized Beam thin film deposition method, a variation on the above


Ellipsometry for analysis of surfaces, films and interfaces with emphasis on data reduction methods

Atomic Force Microscopy advanced image processing and AFM data analysis for modeling of surface roughness in ellipsometry

Research Grants Awarded



6-1-97 to National Science Foundation, Thin Film Deposition Using Nanoparticle Beams

6-1-00 #9614882, PI, $300K


1-1-94 Seed Money support for ellipsometry thin film measuring method, The Gillette Co., PI, $1,000


1 1 93 to Development of a method for investigation of insulating

4 1 93 surfaces and surface films by ellipsometry combined with atomic force microscopy, PPG Glass Research, PI, $22K


8 1 92 to Multichip Module Packaging Enhancement, DARPA,

8 1 95 co-PI, $279K


5 1 91 to Development of Aluminum Nitride Pad Grid Array using

5 1 94 ICB deposition, co-PI, DARPA ~$750K, Urban sub-account $98K


8 1 91 to Diamond Films Formed by the Ionized Cluster Beam

8 1 92 Deposition Technique, DoD, co-PI, $100K


6 1 91 Preliminary Development of Heterogeneous Nucleation

Cluster Source, FIU summer award, PI, $12K


4 1 90 Ionized Cluster Beam III V Microelectronics Films,

National Science Foundation, PI, $5K additional funding


3 1 89 to Development of Ionized Cluster Beam Source, State of Florida High Technology and

3 1 90 Industry Council Applied Research Grants Program, PI, $40K


8 15 88 Japanese Language Fellowship For Frank K. Urban, III, National Science Foundation, PI, support for US Japan cooperation of $6K


3 1 88 Lock in Amplifier for Ionized Cluster Beam Microelectronics Thin Film Research”, University of Miami General Research Support Award, PI, $4K


7 1 87 Vacuum System for Ionized Cluster Beam GaAs Technology Thin Film Depositions, University of Miami College of Engineering, PI, $13K


1 1 87 to Ionized Cluster Beam III V Microelectronics Films,

1 1 90 National Science Foundation, PI, $147K


Teaching Activities


Course Topic, Credits

Texts used


Introductory Electrical Circuit Analysis, 3 hour

Engineering Circuit Analysis, W. Hayt and J. Kemmerly

Basic Engineering Circuit Analysis, J. Irwin

Basic Electric Circuit Analysis, D. Johnson, J. Hilburn, and J. Johnson


Advanced Electrical Circuit Analysis, 3 hour

Same as Introductory Electrical Circuit Analysis


Introductory Electronics, 3 hour

Electronic Circuits, D. Schilling and C. Belove

Electronic Devices and Circuits: Discrete and Integrated, M. Ghausi

Integrated Electronics, Millman and Halkias

Microelectronic Circuits, Sedra/Smith


Advanced Electronics, 3 hour

Same as Introductory Electronics


Solid State Electronics, 3 hour

Solid State Electronic Devices, B. Streetman


Fields and Waves, 3 hour

Applied Electromagnetics, Ulaby


Thin Film Engineering, 3 hour (introduced at FIU)

The Materials Science of Thin Films, Ohring


Electronic Properties of Materials, 3 hour (introduced at FIU

Electronic Properties of Materials, R. E. Hummel


Professional and Honorary Organizations


Order of the Engineer, honorary

Institute of Electrical and Electronics Engineers, member

American Vacuum Society, member

Eta Kappa Nu Electrical Engineering, honorary

Keramos Ceramic Engineering, honorary

Alpha Sigma Mu Metallurgical Engineering, honorary


Professional Service and Activities


Registered Professional Engineer, PE 0036192

Served on advisory board to Florida High Technology and Industry Council, (1984)

Journal Article Reviewer for five scientific journals


Research Proposal Reviewer; National Science Foundation, International Science Foundation

Instituted new session at International conference, International Conference on Metallurgical Coatings and Thin Films ICMCTF-95 and ICMCTF-96, Sessions titled “Ellipsometry: Film Measurement and Growth Control”

Instituted new session at International conference, American Vacuum Society National Symposium, session entitled modeling of thin film growth.

Program chairman for 23rd International Conference on Metallurgical Coatings and Thin Films (1997)

Planning committee for FIU Asia studies program

Elected to Executive Committee of Thin Film Division of AVS

Dade County Public Schools, Career Day, Guest science lecturer

Legal Expert Witness

University Service; Minority Faculty Award Committee, United Way Campaign Department Volunteer, Departmental Committee to revise evaluation form

Awards and Honors


Excellence in Research Award from Florida International University, 1994-95 Honorary Degree and Awards Committee


Urban CV Page 3

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